VSI Technology Library
Welcome to the VSI Technology Library by Virginia Semiconductor, Inc. Here, you’ll find essential information across various categories, available in both Adobe Acrobat and Microsoft Word formats.
Categories
1. General Properties and Specifications
- VSI Specification for SOI Wafers
- Properties of Glass Related to Applications with Silicon
- Basic Wafer Definitions
- VSI Specifications for Silicon Wafers
- General Properties of Si, Ge, SiO₂, and Si₃N₄
- Your Guide to SEMI Specifications for Si Wafers
2. Crystallographic Properties of Si
- Cutting Off-Axis Wafers
- <110> Fz Wafers by Coring (VSI Patent)
- Basic Crystallographic Definitions & Properties of Si, SiGe, & Ge
3. Optical Properties
4. Mechanical and Thermal Properties
- Basic Mechanical and Thermal Properties
5. Transport Properties in Si
- Resistivity, Mobility, & Diffusivity
6. Technology Notes
- Journal on Crystal Growth of SiGe
- Technical Note on ULTRATHIN® Silicon Wafers (<200μm thick)
- Technical Notes on UltraThin® Wafer Bonding (US Patent)
- Wet-Chemical Etching and Cleaning of Silicon
- Oxygen Precipitation in Silicon
Each category includes in-depth resources to support your understanding of silicon wafer technology. For quick downloads, choose your preferred format above.